4800 INTEGRA®

The Nordson DAGE 4800 INTEGRA® is a complete solution for automated semiconductor wafer bond testing. INTEGRA is designed for maximum throughput in an operator free environment. It is our most advanced quality control tool.

Description

Virtually Operator Free Testing

The system is completely controlled via Paragon™ software which uses camera assisted fiducial recognition for automatic testing.
A robotic arm with vacuum end effector selects each wafer and sends to on board aligner.
Internal CCD cameras allow for remote viewing.
The software draws wafer maps in the user interface to show progress of test sites complete, passed, failed and to do.
Use our Multi-functional cartridges (MFC) to perform multiple tests in the same automation pattern.

Full SECS/GEM Integration

The system connects directly to a network to allow full SECS/GEM operation. The 4800 INTEGRA® acts as the workflow controller.
When combined with a FOUP loading system, testing, analysis and results can be entirely automated.
Wafer slot mapping finds wafer positions and selects designated test wafer.
Light towers on both EFEM and enclosure inform operators of current status.
Optional fan filter units and ionisers allow for clean room operation.

Ultimate Accuracy

Shear test and pull micro pillars and bumps <50 microns using Dage’s patented cartridge technology.
In-built anti vibration table ensures adjacent equipment will interfere with test results.
4800 INTEGRA® comes as standard with Renishaw linear encoders in X and Y axes.
High power optics on our TWIN mount arms ensure even the smallest test site is visible, without vibration!

Test Warped Wafers and Panels

Automatic wafer justification combined with our patented Lipseal™ technology ensures that even very warped wafers can be tested accurately.
We have capabilities to automatically justify semiconductor wafers or panels with +10mm of warpage.

There are 2 configurations of Integra: Light curtain or fully enclosed, see the configurations below:

Light curtains are used to protect operators from the test area. If broken the system will pause the current test and restart once the obstruction is removed. The enclosure configuration limits particles and operators gaining access to the tool test site.